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 Nanofabrication Core Facility

Resources and Services

Title Type
ABM Mask Aligner Equipment
Acid Wet Bench & Hood (Litho Area) Equipment
Acid Wet Bench (Chase Area) Equipment
AGS Reactive Ion Etcher (RIE) System Equipment
AIT 4-pt Probe Equipment
Anneal Furnace Equipment
Blanket Expose System Equipment
Branson Plasma Asher Equipment
Cary 5000 UV-Vis-NIR Equipment
CDE Resmap Equipment
Chemical Mechanical Planarization (CMP) Service
CVD Service
Diener Parylene Coater Equipment
ECO-SNOW Equipment
Electron Beam Physical Vapor Deposition (PVD) Equipment
Etch/Cleans Service
Fiji ALD Equipment
Filmetrics F20 Equipment
Filmetrics Profilm 3D Equipment
KARL SUSS MJB3 Mask Aligner Equipment
KLA-TENCOR ALPHA-STEP 200 Equipment
KLA-Tencor P15 Equipment
Kulicke & Soffa Wafer Saw Equipment
Laurell Spin Coater Equipment
Lesker Sputter (DC/RF) Equipment
LP-III Vapor Prime Oven Equipment
Metallization Service
Metrology Service
Nanospec Equipment
Nikon Microscope(s) Equipment
Omax Microscope Equipment
Photolithography Service
Plasma Cleaner Equipment
PlasmaTherm ICP-RIE Equipment
Semitool Spin Rinse Dryer (SRD) Equipment
Sentech Reflectometer Equipment
Signatone 1160 Probe Station Microscope Equipment
Solvent Hood (Litho Area) Equipment
Tempress LPCVD Furnace System Equipment
Thermal Oxidation & Non-Metallic Anneal Furnace Equipment
Thermal Physical Vapor Deposition (PVD) Equipment
UV Cure Station Equipment
Verteq Spin Rinse Dryer (SRD) Equipment
Woollam m2000 Ellipsometer Equipment