ABM Mask Aligner |
Equipment |
Acid Wet Bench & Hood (Litho Area) |
Equipment |
Acid Wet Bench (Chase Area) |
Equipment |
AGS Reactive Ion Etcher (RIE) System |
Equipment |
AIT 4-pt Probe |
Equipment |
Anneal Furnace |
Equipment |
Blanket Expose System |
Equipment |
Branson Plasma Asher |
Equipment |
Cary 5000 UV-Vis-NIR |
Equipment |
CDE Resmap |
Equipment |
Chemical Mechanical Planarization (CMP) |
Service |
CVD |
Service |
Diener Parylene Coater |
Equipment |
ECO-SNOW |
Equipment |
Electron Beam Physical Vapor Deposition (PVD) |
Equipment |
Etch/Cleans |
Service |
Fiji ALD |
Equipment |
Filmetrics F20 |
Equipment |
Filmetrics Profilm 3D |
Equipment |
KARL SUSS MJB3 Mask Aligner |
Equipment |
KLA-TENCOR ALPHA-STEP 200 |
Equipment |
KLA-Tencor P15 |
Equipment |
Kulicke & Soffa Wafer Saw |
Equipment |
Laurell Spin Coater |
Equipment |
Lesker Sputter (DC/RF) |
Equipment |
LP-III Vapor Prime Oven |
Equipment |
Metallization |
Service |
Metrology |
Service |
Nanospec |
Equipment |
Nikon Microscope(s) |
Equipment |
Omax Microscope |
Equipment |
Photolithography |
Service |
Plasma Cleaner |
Equipment |
PlasmaTherm ICP-RIE |
Equipment |
Semitool Spin Rinse Dryer (SRD) |
Equipment |
Sentech Reflectometer |
Equipment |
Signatone 1160 Probe Station Microscope |
Equipment |
Solvent Hood (Litho Area) |
Equipment |
Tempress LPCVD Furnace System |
Equipment |
Thermal Oxidation & Non-Metallic Anneal Furnace |
Equipment |
Thermal Physical Vapor Deposition (PVD) |
Equipment |
UV Cure Station |
Equipment |
Verteq Spin Rinse Dryer (SRD) |
Equipment |
Woollam m2000 Ellipsometer |
Equipment |