Electron Beam Physical Vapor Deposition (PVD)

Located in our Class 100 cleanroom, our BOC Edwards Auto 306 is an electron beam evaporation system used for deposition of ultra pure films of metals as well as fused silica. Fully reproducible parameters provide consistent, repeatable deposition results. The most common metals deposited using this system at MFC are Au, Cu, Ti, Cr. System can deposit up to four different materials in series in the same run. This system is most suitable for thin films of a few nanometers to a few microns.

• Operating Instructions
• Ebeam Process Log (Blank)

Electron Beam Manuals

• RV3, RV5, RV8, and RV12 Rotary Vane Pumps Instruction Manual, Issue P (A652-01-880)
• XDS Replacement Tip Seal Kit Instruction Manual, Issue C (A726-01-840)
• XDS Dry Pump Instruction Manual, Issue H (A726-01-880)
• PVEK Valves Instruction Manual, Issue G (C411-02-885)
• Pirani Vacuum Gauges (For use with 500, 1000, 1700, 2000, and 4000) Instruction Manual, Issue D (D021-57-880)
• Penning Vacuum Gauge Heads CP25EK (D145-35-880)
• Auto 306 Accessories: Water Cooled Crystal Holder, Crystal and Oscillator Unit Instruction Manual, Issue A (E086-67-880)
• Auto 306 Vacuum Coater, Volume 2, Instruction Manual, Issue E (E090-02-860)
• Auto 306 Accessories: Rotary Workholder Volume 1 - Installation and Maintenance Instructions, Issue B (E090-49-880, Vol 1)
• Auto 306 Accessories: Rotary Workholder Volume 2 - Operating Instructions, Issue B (E090-49-880, Vol 2)
• Auto 306 Accessories: EB3 Multihearth Electron Beam Source Accessories, Issue A (E090-72-840)
• Auto 306 Accessories: Workholder and Heater Accessories, Volume 1 - Instruction and Maintenance Instructions, Issue F (E090-26-880)
• Auto 306 Accessories: Manual Source Shutter and Electromagnetic Source Shutter, Volume 1 - Instructions and Maintenance Instructions, Issue G (E090-32-880)
• Auto 306 Accessories: EB3 Multihearth Electron Beam Source and Accessories, Volume 1 - Instruction and Maintenance Instructions, Issue F (E090-72-880)
• XT555H Instruction Manual, Issue A (NRA-266-880)
• FTM7 Film Thickness Monitor, Instruction Manual, Issue B (E086-69-880)
• Auto 306 Vacuum Coater with Turbo Molecular Pumping System, Issue G (E090-03-860)
• Seiko STP 301/451 Turbomolecular Pump Series (MT21E003F)
• Neslab Coolflow II Heat Exchanger (Neslab System II)