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 Nano Fabrication Center

Nano Fabrication Center

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Laurell Spin Coater

A reliable platform used in spin coating primers, photoresists, and polymer coatings located in the lithography area of our Class 100 cleanroom.

  • Operating Instructions (PDF)
  • Lithography Information
    • AZ 3300 Series Datasheet
    • AZ 3312 Data Package
    • AZ P4000 Series Datasheet
    • AZ P4620 Data Package
    • Microchem Su-8 Datasheet
    • Shipley 1800 Series Datasheet
    • Microposit SC 1827 Spin Curve
    • MCC Primer 80/20

Tags

  • Lithography
  • Class 100 (ISO Class 5) clean room
Image
NFC spin coater
Equipment
Contact
Greg Book, PhD
Attachments
solitec_operating_instructions-rev.b.pdf
az_3300.pdf
az_3312_photoresist_data.pdf
az_4000_thick.pdf
az_4620_datasheet.pdf
su8_2-25.pdf
data_s1800.pdf
sc_1827_spin_curve.pdf
mcc_primer_80-20.pdf
Facility
Nano Fabrication Center
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