Used for aligning masks on wafers with photo-resist. Used for 2 and 3 inch wafers. UA MFC Partial Mask Catalog MJB3 Service Manual Operating Instructions Tags Lithography Image Equipment Contact Greg Book, PhD Attachments ua_mfc_mask_catalog-rev._omid_mahdavi.pdf mjb3_service_manual.pdf Karl Suss Mask Aligner Operating Instructions.pdf