Nanofabrication Core Facility
Nano Fabrication Center
LP-III Vapor Prime Oven
The LP III Vapor Prime oven. It is located within the class-100 cleanroom.
Nikon Microscope(s)
There are a few locations throughout the class 100 cleanroom that you will find microscopes. There is only one location to find the Nikon Optizoom which allows for more advanced magnification. These microscopes are often utilized to analyze the structural integrity of various degrees such as bonds, imperfections, and situational accuracy.
Acid Wet Bench (Chase Area)
Located in the chase area outside of the cleanroom. Workspace for processing that does not require ventilation. Equipped with a DI water faucet and a DI water hand sprayer.
Solvent Hood (Litho Area)
Exhausted hood located in the cleanroom's lithography area (yellow room). Workspace for working with solvents and other volatiles. Equipped with filtered N2 gun. Space underneath for storage of common solvents and organics, e.g. developers.
Acid Wet Bench & Hood (Litho Area)
Exhausted wet bench located in the cleanroom's lithography area (yellow room) and equipped with filtered lights. Work space for performing chemical processing. Equipped with 2 DI water faucets, a DI water hand sprayer, and a filtered N2 gun. Space for placement of hot plates. Storage space for common acids and bases underneath.
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