Nano Fabrication Center

Solvent Hood (Litho Area)

Exhausted hood located in the cleanroom's lithography area (yellow room). Workspace for working with solvents and other volatiles. Equipped with filtered N2 gun. Space underneath for storage of common solvents and organics, e.g. developers.

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BFC solvent hood
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Acid Wet Bench & Hood (Litho Area)

Exhausted wet bench located in the cleanroom's lithography area (yellow room) and equipped with filtered lights. Work space for performing chemical processing. Equipped with 2 DI water faucets, a DI water hand sprayer, and a filtered N2 gun. Space for placement of hot plates. Storage space for common acids and bases underneath.

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NFC ACID WET BENCH & HOOD (LITHO AREA)
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Kulicke & Soffa Wafer Saw

The Kulicke and Soffa 780 dicing saw is a back-end processing tool for cutting wafers or substrates, typically silicon or quartz, into smaller pieces or chips for packaging or further processing.

Some of the features of this tool are:

  • Integrated semi-automatic computer controlled precision saw. It is menu driven, with a multi-axis cutting stage with automatic indexing.
  • Employs an extremely thin diamond impregnated cutting wheel with water cooling. The 2" wheel is mounted on an air spindle which is driven at speeds up to 32,000rpm.
  • The chuck accepts up to 6" diameter wafers.
  • Video monitor for online inspection and alignment.
  • Capable of cutting a wide variety of materials such as silicon, quartz, metal coated substrates, glass, ceramics, and sapphire.

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NFC KULICKE & SOFFA WAFER SAW
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Signatone 1160 Probe Station Microscope

Allows users to view samples and save digital images. Current objectives are 4X, 20X, 40X. Scope can accommodate any size sample and is connected to a computer with internet access. Tool can also be set up for parametric probing of devices.

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metrology microscope
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Filmetrics F20

Thickness and optical constants (n and k) and measured quickly and easily with the F20 advanced spectrometry system. Spectral analysis of reflectance from the top and bottom of the thin film provides thickness, refractive index, and extinction coefficient in less than a second. The entire desktop system sets up in minutes and can be used by anyone with basic computer skills.

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NFC FILMETRICS F20
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